| 摘要 |
PROBLEM TO BE SOLVED: To further reduce the amount of use of a cleaning liquid while assuring reliability of priming treatment. SOLUTION: An ejection port of a slit nozzle 72 is opposed in parallel to an apex of a priming roller 14, and the slit nozzle 72 is caused to eject resist liquid R of a specified quantity while causing the priming roller 14 to remain in a standstill. Subsequently, rotation of the priming roller 14 is started and the resist liquid R is wound onto the outer circumferential surface of the priming roller 14. Then, rotational speed of the priming roller 14 is instantly raised, liquid film of the resist liquid R is cut off so as to be divided into the slit nozzle 72 side and the priming roller 14 side, the rotation of the priming roller 14 is continued as it is even after the cutting and the resist liquid film RM<SB>1</SB>is naturally dried. COPYRIGHT: (C)2011,JPO&INPIT
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