Production of Ultrafine Particles in a Plasma System Having Controlled Pressure Zones

摘要

A system and method for making ultrafine particles are disclosed. A high temperature plasma is generated at an inlet end of a plasma chamber into which precursor materials are introduced. A converging member is located adjacent an outlet end of the plasma chamber. During operation, a substantially constant pressure and/or material flow pattern is maintained to reduce or eliminate fouling of the system.