发明名称 SEMICONDUCTOR DEVICE INCLUDING AN IMPROVED LITHOGRAPHIC MARGIN
摘要 A semiconductor device includes first to third lines. The second line has a width equal to the first line. The second line is arranged with a space equal to the width from the first line, and partially has a gap. The third line is connected to one end of the first line and to a side of one end of the second line.
申请公布号 US2010314771(A1) 申请公布日期 2010.12.16
申请号 US20100724051 申请日期 2010.03.15
申请人 HOSOMURA YOSHIKAZU;HISADA TOSHIKI;NAKAJIMA FUMIHARU;KODAMA CHIKAAKI 发明人 HOSOMURA YOSHIKAZU;HISADA TOSHIKI;NAKAJIMA FUMIHARU;KODAMA CHIKAAKI
分类号 H01L23/535 主分类号 H01L23/535
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