| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus and method, capable of efficiently cooling an already-processed wafer, and capable of striking a balance between contradictory requirements of high throughput and space saving. SOLUTION: The semiconductor manufacturing apparatus includes a processing chamber for processing a plurality of substrates and a substrate holder for transporting the plurality of substrates into the processing chamber and holding the plurality of substrates. The substrate holder has a holding section for mounting thereon the plurality of already-processed substrates and a plurality of substrates not to be processed yet between the plurality of already-processed substrate. COPYRIGHT: (C)2011,JPO&INPIT |
