| 摘要 |
PROBLEM TO BE SOLVED: To attain highly precise measurement for a surface deviation and a surface inclination even when an aspherical surface object to be measured has no flanged flat portion. SOLUTION: By optical interference measurement using a first interferometer 1A and a second interferometer 1B, shape data of respective central portions of a first lens surface 91 and a second lens surface 92 of an aspherical surface lens 9 are obtained. From the respective shape data, respective position data of a first umbilicus P<SB>1</SB>, a first curvature center and a first axial line of the first lens surface 91 are obtained in a first measurement coordination system. Moreover, respective position data of a second umbilicus P<SB>2</SB>, a second curvature center and a second axial line of a second lens surface 92 are obtained in a second measurement coordination system. Based on the respective position data and a relative position relationship between the first measurement coordination system and the second measurement coordination system, a surface deviation and a surface inclination of the aspherical lens 9 are obtained. COPYRIGHT: (C)2011,JPO&INPIT
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