| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for transporting and capturing a gas phase component without being accompanied with significant dilution. SOLUTION: This apparatus 10a includes a control surface 15 positioned in close proximity to the surface 14 of a substrate 12 to define the control gap G between the substrate 12 and the control surface 15. A first chamber 17 having a gas introduction device 21, is positioned near the control surface 15. A second chamber 16a having a gas withdrawal device 18a, is positioned near the control surface 15. The control surface 15 and the first and second chambers 17, 16a together define a region in which the mass flow of gas is controlled to significantly reduce the dilution of the gas phase component. This is accomplished through the introduction of a controlled gas stream M1', thereby reducing the flow of an uncontrolled ambient gas stream due to pressure gradients in a system. COPYRIGHT: (C)2011,JPO&INPIT
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