| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzle plate capable of performing high-quality printing for a long period of time when applied to a droplet discharge head, and to provide a method for manufacturing the nozzle plate, a droplet discharge head having excellent dimensional accuracy and high reliability, capable of performing high-quality printing for a long period of time, and to provide a method for manufacturing the droplet discharge head, and a droplet discharge device with high reliability having the droplet discharge head. SOLUTION: An inkjet recording head 1 includes: a nozzle plate 80 having a nozzle hole 11, a water-repellent film 14 on one surface and a joining film 15 on the other surface; a substrate 20 where a discharge liquid reservoir 21 is formed; and a sealing sheet 30 disposed on the upper face of the substrate 20 to cover the discharge liquid reservoir 21. The water-repellent film 14 and the joining film 15 included in the nozzle plate 80 comprise plasma polymerization films having a Si skeleton including a siloxane bond and a random atomic structure, and an alkyl group bonded to the Si skeleton. COPYRIGHT: (C)2011,JPO&INPIT
|
