| 摘要 |
A MEMS device capable of detecting external force with high sensitivity is disclosed. The MEMS device includes: first and second support portions arranged on a substrate; a first movable portion that has a first movable electrode, is fixed to the first support portion at a position apart from the first movable electrode, and is displaced by the external force; and a second movable portion that has a second movable electrode arranged opposite to the first movable electrode, is fixed to the second support portion at a position apart from the second movable electrode, and is displaced by the external force, wherein the first movable portion is fixed to the first support portion between a gravitational center position of the first movable portion and an opposite position where the first movable electrode and the second movable electrode are opposed to each other, and the second movable portion is fixed to the second support portion at a position opposed to the opposite position while sandwiching a gravitational center position of the second movable portion therebetween.
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