ILLUMINATION OPTICAL SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To form a lighting area which has a trapezoidal light intensity distribution in a prescribed direction and also has a pupil intensity distribution in a substantially uniform shape with respect to each point.

SOLUTION: An illumination optical system which lights up a surface (M; W) to be irradiated with light from a light source (1) includes: an optical integrator (7) having a plurality of wavefront division elements arranged in two dimensions and in parallel; and a condensing optical system (8) which condenses luminous flux passed through the wavefront division elements. A first distance along the optical axis of the illumination optical system between a first rear-side focus position of a wavefront division element associated with a first direction (X direction) in a plane (XZ plane) orthogonal to the optical axis (AX) and a front-side focus position of the condensing optical system is larger than a second distance along the optical axis between a second rear-side focus position of the wavefront division element associated with a second direction (Z direction) in the plane and a front-side focus position of the condensing optical system.

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