| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical element configured with a structure which can easily obtain a high-performance antireflection structure in manufacturing, such as, molding without having to increase the height of a grating, in minute concave and convex shapes. <P>SOLUTION: In the optical element where the antireflection structure is formed which has an antireflection function and where a plurality of gratings in a convex shape or a concave shape are arranged on an interface, between a transparent substrate and an incident medium of the transparent substrate, the average interval of the plurality of gratings is an optional wavelength or less among working wavelengths; the antireflection structure is configured so that at least two layers having different filling rate of the gratings in the arranged face of the gratings are laminated; and if the filling rate of the gratings in optional two layers 1 and 2 among the laminated plurality of layers with different filling rate are respectively set as FF1 and FF2, condition 0.36≤FF1-FF2≤0.56 is satisfied. <P>COPYRIGHT: (C)2011,JPO&INPIT |
