| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus which certainly ejects minute liquid droplets having viscosity of≥10 cPs onto a substrate with high precision. SOLUTION: A needle having a hollow structure is attached to a liquid storage container and the liquid storage container is compressed by a definite amount to eject liquid having viscosity of≥10 cPs from a needle tip onto the substrate. In this method for ejecting the liquid, wall thickness (a half of (outer diameter-inner diameter)) of the needle tip is in a range between 0.05 mm and 0.20 mm, the inner diameter of the needle tip is in a range between 0.05 mm and 0.40 mm and an angle made by an extension line of a wall thickness surface of the needle tip and a substrate surface is in a range between 0°and 20°. Thereby dropping of the minute liquid droplets can be achieved with high precision even when the liquid has viscosity of≥10 cPs. COPYRIGHT: (C)2011,JPO&INPIT
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