| 摘要 |
A substrate storage facility comprises a multilevel shelf, on which a plurality of cassettes with airtight covers accommodating a plurality of substrates can be placed; a substrate transport portion, moveably positioned on the front-face side of the multilevel shelf, which opens and closes the airtight covers of the cassettes with airtight covers placed on the multilevel shelf, and which transports the substrates between cassettes with airtight covers; and, a cassette transport portion, moveably positioned on the rear-face side of the multilevel shelf, which carries cassettes with airtight covers into and out of all the cassette placement positions of the multilevel shelf. By means of this substrate storage facility, interchange processing of substrates accommodated in cassettes, as well as carrying in and out of cassettes when appropriate, can be performed.
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