Apparatus and method for manufacturing Poly-Si thin film,申请号KR20080083504-传众专利搜索

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发明名称	Apparatus and method for manufacturing Poly-Si thin film
摘要
申请公布号	KR101002014(B1)	申请公布日期	2010.12.16
申请号	KR20080083504	申请日期	2008.08.26
申请人		发明人
分类号	H01L21/68;H01L21/20	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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