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发明名称
SPUTTERTARGET AUF AG-BASIS UND HERSTELLUNGSVERFAHREN DAFÜR
摘要
申请公布号
DE602004029902(D1)
申请公布日期
2010.12.16
申请号
DE200460029902T
申请日期
2004.07.14
申请人
KABUSHIKI KAISHA KOBE SEIKO SHO;KOBELCO RESEARCH INSTITUTE INC.
发明人
TAKAGI, KATSUTOSHI;NAKAI, JUNICHI;TAUCHI, YUUKI;MATSUZAKI, HITOSHI;FUJII, HIDEO
分类号
C22F1/14;C23C14/34;C22C5/06;C22F1/00
主分类号
C22F1/14
代理机构
代理人
主权项
地址
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