| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric-type actuator capable of accurately forming a piezoelectric body and an electrode only in a desired region, the piezoelectric type actuator manufactured by the method for manufacturing the piezoelectric type actuator, and each device. <P>SOLUTION: The method for manufacturing the piezoelectric-type actuator forming a piezoelectric body element on a board includes a process forming a barrier layer 3 including recesses 5 surrounding piezoelectric body element forming regions 5a on the surface of a common electrode 4 mounted on the silicon board 51, and a process forming the piezoelectric bodies 7 by coating the recesses 5 with a piezoelectric body sol-gel solution 7a, containing a piezoelectric body material by an inkjet method and further includes, a process forming counter electrodes by coating the upper parts of the piezoelectric bodies 7 in the recesses 5, with a liquid containing an electrode material by the inkjet method. <P>COPYRIGHT: (C)2011,JPO&INPIT |
