| 摘要 |
PROBLEM TO BE SOLVED: To provide constitution and a technique of an imaging inspection method slightly changing resolving power when imaging to accurately remove a repeated pattern and detecting a flaw pattern. SOLUTION: When an object to be inspected having the repeated pattern is inspected, imaging is performed with resolving power, wherein the repeated cycle of the object to be inspected and the resolving power of a taken image become an integral ratio, in order to remove a normal repeated pattern from the taken image. A part 101' of the object to be inspected having the repeated pattern is imaged by a camera and the imaging timing of the camera is properly determined so as not only to obtain the taken image 151 but also to perform the imaging timing of the camera at an unequal interval. By this constitution, the imaging is performed with the resolving power, wherein the repeated cycle of the object to be inspected and the resolving power of the taken image become an integral ratio not only to remove the normal repeated pattern but also to detect the flaw pattern. COPYRIGHT: (C)2011,JPO&INPIT
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