发明名称 METHOD FOR IMPROVING THE THERMAL STABILITY OF SILICIDE
摘要 An embodiment of the invention is a method of making a transistor by performing an ion implant on a gate electrode layer 110. The method may include forming an interface layer 200 over the semiconductor substrate 20 and performing an anneal to create a silicide 190 on the top surface of the gate electrode 110.
申请公布号 US2010317170(A1) 申请公布日期 2010.12.16
申请号 US20100860388 申请日期 2010.08.20
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 LU JIONG-PING;XU JIEJIE
分类号 H01L21/336;H01L21/28 主分类号 H01L21/336
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