APPARATUS AND METHOD FOR MANUFACTURING MULTI-COMPONENT OXIDE HETEROSTRUCTURES

摘要

Certain embodiments disclosed herein relate to the formation of multi-component oxide heterostructures (MCOH) using surface nucleation to pattern the atomic layer deposition (ALD) of perovskite material followed by patterned etch and metallization to produce ultra-high density MCOH nano-electronic devices. Applications include ultra-high density MCOH memory and logic, as well as electronic functionality based on single electrons, for example a novel flash memory cell Floating-Gate (FG) transistor with LaAlO3 as a gate tunneling dielectric. Other types of memoiy devices (DIMMS. DRAM, and DDR) made with patterned ALD Of LaAlO3 as a gate dielectric are also possible.