发明名称 NANOWIRE CO-DOPED WITH SILVER AND GROUP III ELEMENTS, APPARATUS AND METHOD FOR FABRICATING THE SAME
摘要 PURPOSE: Apparatus and method for fabricating a nanowire co-doped with silver and group III elements are provided to lower activation energy of the nanowire by aluminum co-doped with silver. CONSTITUTION: A nanowire comprises zinc oxide doped with silver and group III elements. An apparatus for fabricating the nanowire includes a chamber(10), a substrate(20) positioned within the chamber, a target material(30) doped with silver and group III elements, a heater(40) heating the chamber, and a laser generator(50) for irradiating laser to the target material.
申请公布号 KR20100131691(A) 申请公布日期 2010.12.16
申请号 KR20090050410 申请日期 2009.06.08
申请人 KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 LEE, SANG YEOL;SONG, YONG WON;KIM, KYOUNG WON
分类号 B82B1/00;B82B3/00;H01L21/20 主分类号 B82B1/00
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