发明名称 |
NANOWIRE CO-DOPED WITH SILVER AND GROUP III ELEMENTS, APPARATUS AND METHOD FOR FABRICATING THE SAME |
摘要 |
PURPOSE: Apparatus and method for fabricating a nanowire co-doped with silver and group III elements are provided to lower activation energy of the nanowire by aluminum co-doped with silver. CONSTITUTION: A nanowire comprises zinc oxide doped with silver and group III elements. An apparatus for fabricating the nanowire includes a chamber(10), a substrate(20) positioned within the chamber, a target material(30) doped with silver and group III elements, a heater(40) heating the chamber, and a laser generator(50) for irradiating laser to the target material. |
申请公布号 |
KR20100131691(A) |
申请公布日期 |
2010.12.16 |
申请号 |
KR20090050410 |
申请日期 |
2009.06.08 |
申请人 |
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
LEE, SANG YEOL;SONG, YONG WON;KIM, KYOUNG WON |
分类号 |
B82B1/00;B82B3/00;H01L21/20 |
主分类号 |
B82B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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