发明名称 SUBSTRAT ZUR BAUELEMENT-BONDIERUNG, BAUELEMENT-BONDIERTES SUBSTRAT UND HERSTELLUNGSVERFAHREN DAFÜR
摘要 It is an object of the present invention to provide a ceramic substrate with a Pb-free solder layer which has a melting point and bond strength equivalent to those of a Sn-Pb eutectic solder containing Pb that is considered to have a fear of environmental problems. The substrate for device bonding of the invention comprises a substrate having an electrode layer and a solder layer formed on the electrode layer, wherein the solder layer is a Pb-free solder layer which comprises (1) a base metal composed of (i) Sn, (ii) Sn and Au, or (iii) In, (2) at least one metal selected from the group consisting of Bi, In (only in the case where the base metal is Sn, or Sn and Au), Zn, Au (only in the case where the base metal is In) and Sb, and (3) at least one metal selected from the group consisting of Ag, Ni, Fe, Al, Cu and Pt, and the solder layer has a thickness of 1 to 15 µm and a surface roughness (Ra) of not more than 0.11 µm.
申请公布号 DE602004029915(D1) 申请公布日期 2010.12.16
申请号 DE20046029915T 申请日期 2004.08.17
申请人 TOKUYAMA CORP. 发明人 YOKOYAMA, HIROKI;TAKEDA, YASUKO;YAMAMOTO, REO
分类号 H01L21/52;H01L23/15;H01L23/373 主分类号 H01L21/52
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