MANUFACTURING METHOD OF MANUFACTURING TUNING FORK TYPE PIEZOELECTRIC VIBRATION PIECE, TUNING FORK TYPE PIEZOELECTRIC VIBRATION PIECE, AND PIEZOELECTRIC VIBRATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing most tuning fork type piezoelectric vibration pieces formed on a piezoelectric wafer as completed products.

SOLUTION: This method of manufacturing a tuning fork type piezoelectric vibration piece manufactures, from a piezoelectric wafer, a tuning fork type piezoelectric vibration piece 20 including a base part and a pair of vibration arms 21 extending from one end of the base part. The manufacturing method includes: a corrosion-resistant film formation process of forming a corrosion-resistant film on the piezoelectric wafer; a photosensitive material formation process of forming a photosensitive material on the corrosion-resistant film; a first exposure process of exposing the photosensitive material to light for forming the outline of the tuning fork type piezoelectric vibration piece on the corrosion-resistant film; a second exposure process of exposing the photosensitive material to light for a polarization groove extending between the pair of vibration arms and from one end of the base part toward the other end of the base part on the corrosion-resistant film; an etching process of etching the piezoelectric wafer with the photosensitive material and the corrosion-resistant film removed therefrom; a first excitation process of exciting the tuning fork type piezoelectric vibration piece by carrying a current to the corrosion-resistant film divided by the polarization groove; and a weight reduction process of reducing the weight of the vibration arm by removing a part of the vibration arm based on the excitation condition obtained by the first excitation process.

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