发明名称
摘要 <p>An accelerated and simple-to-realize fast method for thermally converting metallic precursor layers on any desired substrates into semiconducting layers, and also an apparatus suitable for carrying out the method and serving for producing solar modules with high efficiency are provided. The substrates previously prepared at least with a metallic precursor layer are heated in a furnace, which is segmented into a plurality of temperature regions, at a pressure at approximately atmospheric ambient pressure in a plurality of steps in each case to a predetermined temperature up to an end temperature between 400° C. and 600° C. and are converted into semiconducting layers whilst maintaining the end temperature in an atmosphere comprising a mixture of a carrier gas and vaporous chalcogens.</p>
申请公布号 JP2010539679(A) 申请公布日期 2010.12.16
申请号 JP20100523359 申请日期 2008.09.11
申请人 发明人
分类号 H01L21/203;H01L31/04 主分类号 H01L21/203
代理机构 代理人
主权项
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