发明名称 |
System, Method and Apparatus for a Micromachined Interferometer Using Optical Splitting |
摘要 |
A Mach-Zehnder MEMS interferometer is achieved using two half plane beam splitters formed at respective edges of a first medium. The first beam splitter is optically coupled to receive an incident beam and operates to split the incident beam into two beams, a first one propagating in the first medium towards the second beam splitter and a second one propagating in a second medium. A moveable mirror in the second medium reflects the second beam back towards the second beam splitter to cause interference of the two beams.
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申请公布号 |
US2010315647(A1) |
申请公布日期 |
2010.12.16 |
申请号 |
US20100849638 |
申请日期 |
2010.08.03 |
申请人 |
SI-WARE SYSTEMS |
发明人 |
SAADANY BASSAM A.;KHALIL DIAA A.;BOUROUINA TARIK E. |
分类号 |
G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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