| 摘要 |
<p>Disclosed is a transfer module wherein a transfer chamber housing a robot can be made compact. The robot (12) transferring an object (W) is housed inside the transfer chamber (14). The robot (12) is provided with arms (33, 34) which are coupled to drive shafts (31,32) and rotate in the horizontal plane, an arm support part (42) which supports positions of the arms (33,34) away from the drive shafts (31, 32) and transmits the weight of the arms (33,34) to the bottom surface (14a) of the transfer chamber (14), and a holding part (39) which holds the object (W) and moves in the horizontal plane by the rotating of the arms (33,34). As the arms (33, 34) no longer have to be supported on one side by the joints of the robot (12), the rigidity of the joints of the robot (12) and the arms (33, 34) can be reduced. As the height dimension of the robot (12) is determined by the rigidity of the joints of the robot (12) and the arms (33, 34), the height dimension of the robot (12) can be minimized.</p> |
