METHOD AND FACILITY FOR THE PRODUCTION OF A LAYER-LIKE PART,申请号EP20040786902-传众专利搜索

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发明名称	METHOD AND FACILITY FOR THE PRODUCTION OF A LAYER-LIKE PART
摘要
申请公布号	EP1668173(B1)	申请公布日期	2010.12.15
申请号	EP20040786902	申请日期	2004.09.28
申请人	SIEMENS AKTIENGESELLSCHAFT	发明人	HANSEN, CHRISTIAN;KRUEGER, URSUS;PYRITZ, UWE
分类号	C25D1/20;C23C14/00;C23C14/56;C25D1/04;C30B25/18;H01L39/24	主分类号	C25D1/20
代理机构		代理人
主权项
地址

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