| 摘要 |
PURPOSE: A wafer position detection device is provided to detect the position of a wafer seated on a chuck plate precisely by installing an approaching sensor on a pin of an area corresponding to an edge of rectangle. CONSTITUTION: A plurality of pins(111) is installed on the upper side of a chuck plate(110). A wafer(W) is seated on the plurality of pins. A proximity sensor(120) is installed on the several pins selected out of the plurality of pins. A controller(130) processes as being inputted with the wafer sensing signal from the proximity sensor.
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