发明名称 Optical waveguide devices with additional polysilicon layers
摘要 A device for coupling light into/from an integrated optical/electronic circuit disposed at least in part in a wafer having an insulator layer (152, 104) and an upper semiconductor layer that includes an optical waveguide (160). The integrated optical/electronic circuit includes at least one active optical waveguide device (150), and at least one passive optical waveguide device (800), each of which is associated with, at least in part, in the upper semiconductor layer. In one aspect, the passive optical waveguide device (800) can be created by deposing a polysilicon layer (191) on the upper semiconductor layer. In another aspect, the passive optical waveguide device can be created by etching a Total Internal reflection (TIR) boundary within the upper semiconductor layer.
申请公布号 EP2261953(A2) 申请公布日期 2010.12.15
申请号 EP20100075634 申请日期 2002.05.15
申请人 OPTRONX, INC. 发明人 DELIWALA, SHRENIK
分类号 H01L21/00;G02B5/04;G02B6/10;G02B6/12;G02B6/122;G02B6/124;G02B6/26;G02B6/28;G02B6/34;G02B6/42;G02B6/43;G02B27/28;G02F1/01;G02F1/015;G02F1/025;G02F1/295;G06G7/48;H01L27/12 主分类号 H01L21/00
代理机构 代理人
主权项
地址