摘要 |
<P>PROBLEM TO BE SOLVED: To fabricate a complicated fine structure comprising an article having an isotropic figure without inducing collapse. <P>SOLUTION: A liquid photosetting resin is not used but a solid photo-crosslinking reactive positive resist material is used as a photo molding material. The material is irradiated with condensed pulse laser light while scanning to induce photo-crosslinking reaction by mulitphoton absorption at the position where the light is condensed, and thereby, a complicated fine structure comprising an article having an isotropic figure can be produced. The intensity and the scanning speed of the pulse laser light are controlled to the respective optimum values to sufficiently induce the photo-crosslinking reaction. <P>COPYRIGHT: (C)2006,JPO&NCIPI |