WAFER FLAT ZONE ALIGNER WHICH INCLUDES FUNCTION OF EDGE CRACK DETECTOR AND OPERATING METHOD THEREOF

摘要

PURPOSE: A wafer flat zone aligner including an edge crack detecting function and a driving method of the same are provided to simultaneously perform a flat zone align operation and an edge crack detecting operation by splitting one laser using a beam splitter. CONSTITUTION: A beam splitter(4) splits laser from laser source into two lasers. A first optical system(2) horizontally radiates first laser split from the beam splitter to the surface of a wafer along a first path. A second optical system(3) radiates second laser split from the beam splitter to the surface of the wafer along a second path. A first optical sensor(9) detects a first laser transmitted through the float zone of the wafer. A second optical sensor(14) detects the second laser transmitted through the edge crack of the wafer.