| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for repairing defects efficiently. SOLUTION: The apparatus 1 for repairing defects is provided with: a substrate placing table 3 for fixing a conveyed substrate; a plurality of liquid droplet discharging units 11 which are disposed along the direction different from the conveying direction of the substrate when viewed from the direction perpendicular to the substrate fixed on the substrate placing table 3 and used for discharging liquid droplets to defects dotted on the substrate; a head gantry unit 7 on which the plurality of liquid droplet discharging units 11 are mounted; and a gantry sliding mechanism 4 for relatively moving the head gantry unit 7 at a constant speed along the conveying direction of the substrate. The plurality of liquid droplet discharging units 11 are moved independently of one another along the direction different from the conveying direction of the substrate according to data expressing positions of a plurality of defects dotted on the substrate while the head gantry unit 7 is moving along the conveying direction of the substrate. COPYRIGHT: (C)2008,JPO&INPIT |
