发明名称
摘要 PROBLEM TO BE SOLVED: To eliminate troublesome control such as moving a multi-blade little by little in the case of recognizing an outer diameter of each blade constituting the multi-blade. SOLUTION: A cutting apparatus includes blade outer diameter recognition means 2 for recognizing outer diameters of individual cutting blades 161a to 161e that constitute a blade 161, and the blade outer diameter recognition means 2 has contacts 23a to 23e each of which makes contact with an outer periphery end of each of the individual cutting blades 161a to 161e for every cutting blade. The outer diameter of each of the individual cutting blades 161a to 161e is estimated, based on a contact position between each of individual contacts 23a to 23e and a corresponding cutting blade. There is no need of moving the blade for recognizing the outer diameter of the blade and of troublesome control therefor. It is thus possible to recognize outer diameters of all blades in a short time. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP4596934(B2) 申请公布日期 2010.12.15
申请号 JP20050050642 申请日期 2005.02.25
申请人 发明人
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
主权项
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