Intregrated magnetic triaxial sensor

摘要

The present invention concerns an integrated triaxial magnetic sensor device 100 apt to detect a magnetic field comprising: a substrate 120 having a surface defining a reference plane (x,y); a first sensor unit 101 arranged on a first main surface 121 of the substrate in a first plane substantially parallel to the reference plane; a second sensor unit 102 arranged on a second plane, and a third sensor unit 103 arranged on a third plane, the second and third planes being not parallel to the reference plane. The device further comprises: a first cantilever structure 115 raised with respect to the reference plane by a first elevation angle and having a second main surface 125 arranged along the second plane, the first cantilever structure including the second sensor unit 102, and a second cantilever structure 116 raised with respect to the reference plane by a second elevation angle and having a third main surface 126 arranged along the third plane, the second cantilever structure including the third sensor unit 103, in which the first and the second cantilever structure are structurally connected to the substrate 120 through a respective first and second hinge structure 113, 114 curved with respect to the reference plane and bearing the respective cantilever structure while maintaining it raised with respect to the reference plane.