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发明名称	STORAGE SYSTEM FOR WAFERS
摘要
申请公布号	EP1639626(B1)	申请公布日期	2010.12.15
申请号	EP20040740098	申请日期	2004.06.19
申请人	DYNAMIC MICROSYSTEMS SEMICONDUCTOR EQUIPMENT GMBH	发明人	MORAN, THOMAS, J.
分类号	H01L21/00;B65G1/00;H01L21/677	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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