CLAMP FOR FILAMENT OF ION INJECTING MACHINE

摘要

PURPOSE: A clamp for fixing filament in an ion implanting device is provided to stably supply power by fixing the rear of the filament by using a fastening controller and a connector assembled with a clamp body. CONSTITUTION: A clamp body(10) has a tapered fitting hole. A connector(20) is inserted into the fitting hole. A fastening controller(30) is combined with the connector and transfers the connector to the tapered direction of the fitting hole. The rear of the filament inserted to an insertion hole(21) of the connector is fixed.