发明名称 |
COMBINED PUMPING SYSTEM COMPRISING A GETTER PUMP AND AN ION PUMP |
摘要 |
A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of the flange at two different points thereof. The flange can be mounted to a vacuum chamber, such that the combined pumping system evacuates the vacuum chamber. |
申请公布号 |
EP2260502(A1) |
申请公布日期 |
2010.12.15 |
申请号 |
EP20090726197 |
申请日期 |
2009.03.26 |
申请人 |
SAES GETTERS S.P.A. |
发明人 |
FERRIS, MICHAEL LAURENCE;CONTE, ANDREA |
分类号 |
H01J41/00 |
主分类号 |
H01J41/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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