| 摘要 |
PURPOSE: An apparatus for heating etching chemical in order to manufacture semiconductors is provided to improve heat transferring efficiency by including a heating unit on the external wall of a chemical storing tank. CONSTITUTION: A support fixing part is combined with the center part on the base side of a housing(11). A heater coil supporter(20) is installed on the upper side of the support fixing part. A heater coil(23) is installed in a heater coil loading groove(21). An interval maintaining ring(30) is interposed between the housing and the heater coil supporter. A heat transferring media(M) transfers heat from the heater coil to chemical.
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