| 摘要 |
PURPOSE: An integrated MEMS(Micro Electro Mechanical System) sensor device is provided to reduce a space, which is occupied by a sensor. CONSTITUTION: An integrated MEMS(Micro Electro Mechanical System) sensor device comprises a first substrate, a second substrate, one or more MEMS sensors and one or more additional sensors. The first substrate comprises a surface unit. The second substrate is connected to the surface of the first substrate. A cavity(230) is defined between the first and second substrates. The MEMS sensors are at least partially arranged on the first substrate and are communicated with the cavity.
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