| 摘要 |
<p>PURPOSE: A blank-mask transport box is provided to uniformize sensitivity variation on the entire resist layer by forming a path capable of enabling out-gassing components to be sufficiently circulated inside a transport box. CONSTITUTION: A box body(310) has a groove which has a uniform size. A mask storage box(320) is inserted into the groove of the box body. An empty space(410) is formed between the box body and the mask storage box. A slot(322) is formed into a projected structure in order to support a blank-mask. The slot includes a first penetration part which is formed in a front part and a second penetration part which is formed in a lateral part.</p> |
