| 摘要 |
PROBLEM TO BE SOLVED: To provide a form measuring instrument, a form measuring method, and a program capable of performing safe and high-accuracy centering. SOLUTION: The form measuring instrument includes a control unit 41 for arranging a measuring object 4 being a rotating body at a first position P1. At the first position P1, the control unit 41 moves a contact piece 24 in parallel to an X axis so as to trace the surface of the measuring object 4, and acquires a first measurement curve L1. The control unit 41 rotates the measuring object 4 around a Z axis by 90 degrees, and arranges the measuring object 4 at a second position P2. At the second position P2, the control unit 41 moves the contact piece 24 in parallel to the X axis so as to trace the surface of the measuring object 4, and acquires a second measurement curve L2. The control unit 41 fits circles to the first and second measurement curves L1 and L2, respectively, and calculates the positions in the X-axis direction of maximum values M1, M2 of respective circles. The control unit 41 moves the measuring object 4 in the X-axis and Y-axis directions such that the positions in the X-axis direction of the maximum values M1, M2 bocome zero. COPYRIGHT: (C)2011,JPO&INPIT
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