| 摘要 |
Provided is an optical element having a high performance anti-reflection structure without increasing the height of the grating, including: a transparent substrate on which an anti-reflection structure having a plurality of gratings having one of a convex shape and a concave shape are arranged is formed, the plurality of gratings being arranged with an average interval of a wavelength equal to or smaller than a predetermined wavelength falling within a working wavelength range, the anti-reflection structure including a structure wherein a first layer and a second layer having different filling factors of gratings in the arrangement surface of the gratings are laminated, and the first layer and the second layer satisfying a conditional expression of 0.36≦̸FF1−FF2≦̸0.56 when the first layer has a filling factor FF1 of the gratings therein and the second layer has a filling factor FF2 of the gratings therein.
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