Drive control method for moving body, exposure method, robot control method, drive control apparatus, exposure apparatus and robot apparatus

摘要

A drive control apparatus includes: a first feed-forward control unit which obtains a first feed-forward signal by applying a first perfect tracking control method to a first transfer function which shows a portion of an inverse system of transfer characteristics of a control subject; a second feed-forward control unit which obtains a second feed-forward signal by applying a second perfect tracking control method to a second transfer function which shows a portion of an inverse system of transfer characteristics of the control subject and which is different from the first transfer function; and an external disturbance observer which obtains a first compensation signal for the first feed-forward signal, wherein the control subject is driven using a second compensation signal which is obtained from the second feed-forward signal and the first compensation signal.