METHODS OF THERMAL PROCESSING A SOLAR CELL

摘要

Embodiments of the invention contemplate the formation of high efficiency solar cells and novel methods for forming the same. Embodiment of the invention can be used to form a solar cell that has doped regions that act as a back surface field. The methods and apparatus disclosed herein may include the use of a doping source, a rapid annealer and a slow annealer. One embodiment of the methods used to form an improved emitter structure include disposing an amount of a dopant atom in a substrate and performing two or more thermal processing steps to cause the dopant to diffuse deeper into the substrate to achieve a desirable multi-facet doping profile.