NEGATIVELY CHARGED PASSIVATION LAYER IN A PHOTOVOLTAIC CELL
摘要
Embodiments of the invention are directed to methods and apparatus for processing of a solar substrate for making a photovoltaic device. In particular, methods and apparatus for creating a negatively charged passivation layer by are provided.
申请公布号
WO2010091247(A3)
申请公布日期
2010.12.02
申请号
WO2010US23311
申请日期
2010.02.05
申请人
APPLIED MATERIALS, INC.;BORDEN, PETER, G.;OLSEN, CHRISTOPHER, S.
