| 摘要 |
PROBLEM TO BE SOLVED: To improve operation efficiency of a stage device. SOLUTION: The stage device includes three vertical actuators which move a stage in a vertical direction individually at three positions not on the same straight line, a first actuator whose line of action passes through the center of the gravity of the stage along a plane orthogonal to the vertical direction and which moves the stage in a horizontal direction, and a second actuator and a third actuator whose lines of action are orthogonal to the line of action of the first actuator in planes orthogonal to the vertical direction and which move the stage in the horizontal direction, wherein the line of action of the second actuator crosses a line of action of at least one of the three vertical actuators, and the line of action of the third actuator crosses a line of action of at least one vertical actuators different from the one of the three vertical actuators. COPYRIGHT: (C)2011,JPO&INPIT |
