| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card, a probe card manufacturing method, and a test apparatus which control the positional behavior of a probe needle tip during a heating test to provide a stable test environment. SOLUTION: The probe card includes a probe needle, a fixing member for fixing the probe needle, a probe card substrate for fixing the fixing member, and a holder member for mounting the probe card substrate to the test apparatus. The fixing member is fixed to the bottom of a recessed part provided in the probe card substrate. COPYRIGHT: (C)2011,JPO&INPIT
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