发明名称 |
Method of manufacturing magnetic head for perpendicular magnetic recording including two side shields |
摘要 |
A magnetic head includes a pole layer, first and second side shields, and an encasing layer having first to third grooves that accommodate the pole layer and the first and second side shields. A manufacturing method for the magnetic head includes the step of forming the first to third grooves in a nonmagnetic layer by using an etching mask layer having first to third openings. This step includes the steps of forming the first groove by etching the nonmagnetic layer using the first opening, with the second and third openings covered with a first mask; and forming the second and third grooves by etching the nonmagnetic layer using the second and third openings, with the first opening covered with a second mask.
|
申请公布号 |
US2010301007(A1) |
申请公布日期 |
2010.12.02 |
申请号 |
US20090457090 |
申请日期 |
2009.06.01 |
申请人 |
HEADWAY TECHNOLOGIES, INC. |
发明人 |
ISHIZAKI KAZUO;SASAKI YOSHITAKA;ARAKI HIRONORI;ITO HIROYUKI;TANEMURA SHIGEKI;HAN CHERNG-CHYI |
分类号 |
B44C1/22 |
主分类号 |
B44C1/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|