| 摘要 |
PROBLEM TO BE SOLVED: To provide a direct drive motor which detects rotation angles of a rotor highly accurately while avoiding atmosphere contamination, while ensuring reliability. SOLUTION: Since a disk part 13a of a partition 13 is thicker than that of a cylindrical part 13b, even if the partition 13 is deformed because of dimensional accuracy, machine precision, or temperature changes, the thin cylindrical part 13b is deformed first and axial stress or bending stress of the partition 13 can be eased, thereby preventing defective sealing, breakdown, or the like. COPYRIGHT: (C)2011,JPO&INPIT
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