MICROMECHANICAL COMPONENT AND PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT

摘要

The invention relates to a micromechanical component comprising an outer stator electrode component (28) and an outer actuator electrode component (24) connected to a holding element (55) by means of at least one outer spring (81). A mobile element (10) can be moved about a first rotational axis (12) by applying a first voltage between the outer actuator electrode component (24) and the outer stator electrode component (28). Said micromechanical component also comprises an inner stator electrode component (30) and an inner actuator electrode component (26) comprising a first web (50) provided with at least one electrode finger (26a,26b), the mobile element (10) being mobile about a second rotational axis (14) by applying a second voltage between the at least one electrode finger (26a, 26b) of the inner actuator electrode component (26) and the inner stator electrode component (30), the inner actuator electrode component (26) being connected to the outer actuator electrode component (24) by means of an intermediate spring (52) oriented in the direction of the second rotational axis (14). The invention also relates to a production method for a micromechanical component.