This application claims all rights and priority on co-pending United States provisional patent application serial number 61/152,578 filed 2009.02.13. This invention relates to the field of plasma light sources. More particularly, this invention relates to increasing the brightness of plasma light sources.
申请公布号
WO2010093903(A3)
申请公布日期
2010.12.02
申请号
WO2010US24074
申请日期
2010.02.12
申请人
KLA-TENCOR CORPORATION;BEZEL, ILYA, V.;SHCHEMELININ, ANOTOLY;SHIFRIN, EUGENE;DERSTINE, MATTHEW, W.
发明人
BEZEL, ILYA, V.;SHCHEMELININ, ANOTOLY;SHIFRIN, EUGENE;DERSTINE, MATTHEW, W.
