发明名称 |
APPARATUS FOR MANUFACTURING THIN FILM SOLAR CELL |
摘要 |
<p>An apparatus for manufacturing a thin film solar cell of the present invention has a film forming chamber in which a substrate is arranged so that the film formation face of the substrate is substantially parallel to the direction of gravitational force and a film is formed on the film formation face by a CVD method; an electrode unit including a cathode unit having cathodes to which voltages are to be applied arranged on both sides thereof, and a pair of anodes each of which is arranged to face the cathodes, respectively, at a separation distance therefrom; and a conveying part which supports the substrate and conveys the substrate to between the cathode and the anode facing the cathode. The separation distance is variable.</p> |
申请公布号 |
KR20100126825(A) |
申请公布日期 |
2010.12.02 |
申请号 |
KR20107023584 |
申请日期 |
2009.06.04 |
申请人 |
ULVAC, INC. |
发明人 |
SHIMIZU YASUO;OGATA HIDEYUKI;MATSUMOTO KOICHI;NOGUCHI TAKAFUMI;WAKAMORI JOUJI;OKAYAMA SATOHIRO;MORIOKA YAWARA;SUGIYAMA NORIYASU;SHIGETA TAKASHI;KURIHARA HIROYUKI |
分类号 |
H01L31/18;H01L21/205;H01L31/042 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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